鄭錫恩
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| 姓 名 | 鄭 錫 恩 | 職 稱 | 教授 |
| 校 內 分 機 | ( 06 )-2533131 # 3623 | |||
| 研 究 室 | Q204-4 | |||
| E - mail | sean@stust.edu.tw | |||
| 最 高 學 歷 | 國立成功大學 / 材料博士 | |||
| 研 究 領 域 | 半導體製程、薄膜工程、太陽能光電 | |||
| 經 歷 |
服務機關 | 職稱 | 起迄年月 |
南臺科技大學 | 教授 | 2013 / 08 至 迄今 |
| 南臺科技大學 | 教授 /系主任 | 2010 / 08 至 2013 / 07 |
南臺科技大學 | 助理教授 / 副教授 | 2000 / 08 至 2010 / 07 |
南亞科技（股）公司 | 製程資深工程師 / 課經理 | 1997 / 11 至 2000 / 07 |
棨驊工業（股）公司 | 總經理室 - 特別助理 | 1996 / 04 至 1997 / 10 |
林陽玻璃（股）公司 | 濺鍍課研發工程師 | 1991 / 04 至 1992 / 07 |
| 獲 獎 榮 譽 |
1. 2021 ISNST國際研討會海報論文優等獎「UV Light Activated TiO2 and SnO2 Thin Flim Sensors for detecting Alcohol Gas at Room Temperature」 |
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2. 2011 國際奈米研討會海報論文佳作獎二篇
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3. 2010 南台科大國科會特殊優秀人才獎
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4. 2010 南台科大第十三屆學生專題競賽特優獎指導老師
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5. 2008 年材料年會海報論文佳作獎一篇
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6. 2006 台灣鍍膜協會年會論文優等獎一篇
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7. 2006 績優導師
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| 期 刊 論 文 |
| 2021 | Chun-Chieh Chang, Shin-Chun Kuo, Hsyi-En Cheng, Hou-Tong Chen, Zu-Po Yang, “Broadband titanium nitride disordered metasurface absorbers”, Optics Express 29 (2021) 42813-42826. |
| 2019 | Hsyi-En Cheng, Wen-Lung Li and Zu-Po Yang, “Enhancement of Hydrogen Evolution Reaction by Pt Nanopillar-Array Electrode in Alkaline Media and the Effect of Nanopillar Length on the Electrode Efficiency”, Int. J. Hydrogen Energy 44 (2019) 30141-30150 |
| 2018 | Hsyi-En Cheng, Chi-Hsiu Hung, Ing-Song Yu, Zu-Po Yang, “Strongly Enhancing Photocatalytic Activity of TiO2 Thin Films by Multi-Heterojunction Technique”, Catalysts 8 (2018) 440 |
| 2018 | Tsung-Cheng Chen, Tsuo-Chuan Yang, Hsyi-En Cheng, Ing-Song Yu, Zu-Po Yang, “Single Material TiO2 Thin Film by Atomic Layer Deposition for Antireflection and Surface Passivation Applications on P-Type C-Si”, Applied Surface Science 451 (2018) 121–127 |
| 2017 | Chien-Ming Fan Chiang, Bo-Ren Chang, Ya-Ju Lee, Monima Sarma, Zu-Po Yang, Hai-Ching Su, Hsyi-En Cheng , Ken-Tsung Wong, “Improving color saturation of blue light-emitting electrochemical cells by plasmonic filters”, Organic Electronics 51 (2017) 70-75 |
| 2017 | Ing-Song Yu, Hsyi-En Cheng, Chun-Chieh Chang, Yan-Wei Lin, Hou-Tong Chen, Yao-Chin Wang, Zu-Po Yang, “Substrate-insensitive atomic layer deposition of plasmonic titanium nitride films”, Optical Materials Express 7 (2017) 777-784 |
| 2017 | Hsyi-En Cheng, Chun-Yuan Lin and Ching-Ming Hsu, Fabrication of SnO2-TiO2 core-shell nanopillar-array films for enhanced photocatalytic activity, Applied Surface Science 396 (2017) 393–399 |
| 2016 | Zu-Po Yang, Hsyi-En Cheng, I-Hsuan Chang, Ing-Song Yu, “Atomic Layer Deposition TiO2 Films and TiO2/SiNx Stacks Applied for Silicon Solar Cells”, Applied Sciences, 6, 233 (2016) |
| 2016 | Hsyi-En Cheng, Chia-Hui Wen and Ching-Ming Hsu, “Morphology, composition and electrical properties of SnO2:Cl thin films grown by atomic layer deposition”, J. Vac. Sci. Technol. A34, 01A112 (2016) |
| 2014 | Hsyi-En Cheng, Shu-Yin Lin, De-Cih Tian, ‘Fabrication of Nickel Nanopillar-Array Electrodes for Water Electrolysis’, J. Electrochem. Soc. 161(14) E202-E206 (2014) |
| 2013 | Ing-Song Yu, Yu-Wun Wang, Hsyi-En Cheng, Zu-Po Yang, Chun-Tin Lin (2013, Dec). Surface Passivation and Antireflection Behavior of ALD TiO2 on n-Type Silicon for Solar Cells. International Journal of Photoenergy, 2013, Article ID 431614. (SCI, 10/80, OPTICS). NSC 101-2218-E-259-001. |
| 2013 | Wei-Chih Lai, Cheng-Hsiung Yen, Jhen-Zih Li, Ya-Yu Yang, Hsyi-En Cheng (2013, Aug). GaN-Based Light-Emitting Diodes on Electrochemically Etched n¯-GaN Template. IEEE Photonics Technology Letters, 25(15), 1531-1534. (SCI, 19/80, OPTICS). |
| 2013 | Y.-H. Chang, C.-M. Liu, H.-E. Cheng, C. Chen, “Effect of Geometric Nanostructures on the Absorption Edges of 1D and 2D TiO2 Fabricated by Atomic Layer Deposition”, ACS Appl. Mater. Interfaces 2013, 5, 3549−3555 |
| 2012 | Yung-Huang Chang, Chih Chen, Hsyi-En Cheng, “The hetero-junction effects on photocarrier transportation direction of TiO2 nanotubes fabricated by atomic layer deposition”, Nanoscale Research Letters, 2012, 7:231 |
| 2012 | Y.-H. Chang, C.-M. Liu, C. Chen, H.-E. Cheng, “The Effect of Geometric Structure on Photoluminescence Characteristics of 1-D TiO2 Nanotubes and 2-D TiO2 Films Fabricated by Atomic Layer Deposition” J. Electrochem. Soc. 159 (7) D401-D405 |
| 2012 | Chih Chen, Yung-Huang Chang, Hsyi-En Cheng, and Tien-chang Lu, “The differences in optical characteristics of TiO2 and TiO2/AAO nanotube arrays fabricated by atomic layer deposition", J. Electrochem. Soc. 159 (5) K136-K140 (2012) |
| 2012 | H.-E. Cheng, D.-C. Tian, K.-C. Huang, “Properties of SnO2 Films Grown by Atomic Layer Deposition”, Procedia Engineering 36 (2012) 510–515 (EI) |
| 2011 | Hsyi-En Cheng, Yu-Ru Chen, Wen-Tuan Wu, Ching-Ming Hsu,Effect of nitrogen doping concentration on the properties of TiO2 films grown by atomic layer deposition,Materials Science and Engineering Bvol.176,no.7,pp596–599,2011 |
| 2011 | Chien-Min Liu, Chih Chen, Hsyi-En Cheng,Ultraviolet Photoresponse of TiO2 Nanotube Arrays Fabricated by Atomic Layer Deposition,Electrochemical and Solid-State Lettersvol.14,no.6,ppK33-K35,2011 |
| 2011 | Chien-Min Liu, Chih Chen, Hsyi-En Cheng,Growth Mechanism of TiO2 Nanotube Arrays in Nanopores of Anodic Aluminum Oxide on Si Substrates by Atomic Layer Deposition,Journal of the Electrochemical Societyvol.158,no.3,ppK58-K63,2011 |
| 2010 | 鄭錫恩、郭彥良、邱南榮,以核殼奈米柱結構提升氮摻雜二氧化鈦薄膜之光電響應,真空科技vol.23,no.2,pp45-50,2010 |
| 2010 | Yung-Huang Chang, Chien-Min Liu, Yuan-Chieh Tseng, Chih Chen, Chia-Chuan Chen and Hsyi-En Cheng,Direct probe of heterojunction effects upon photoconductive properties of TiO2 nanotubes fabricated by atomic layer deposition,Nanotechnologyvol.22,no.21,pp225602-22568,2010 |
| 2010 | Wen-Tuan Wu, Chia-Jen Chang, Hsyi-En Cheng, Ching-Ming Hsu, Kun-San Tsen,Continuous cell air-extracting technique used for fast cell filling of flexible liquid-crystal displays,J. Vac. Sci. Technol. Bvol.28,no.4,pp673-677,2010 |
| 2010 | Hsyi-En Cheng, S. H. Hsiao, Deng-Maw Lu,Enhancement of photoelectrochemical properties of ALD TiO2 films by light-trapping effect,Electrochemical and Solid-State Lettersvol.13,no.5,ppD19-D22,2010 |
| 2009 | Hsyi-En Cheng, Chung-Ho Lai, Chien-Lung Huang,Properties of ITO transparent conducting films grown by sputtering at room temperature,南台科技大學學報vol.34,no.4,pp11-15,2009 |
| 2009 | Hsyi-En Cheng, Ching-Ming Hsu, and Yi-Chih Chen,Substrate Materials and Deposition Temperature Dependent Growth Characteristics and Photocatalytic Properties of ALD TiO2 Films,JOURNAL OF ELECTROCHEMICAL SOCIETYvol.156,no.8,ppD275-D278,2009 |
| 2009 | Hsyi-En Cheng*, Meng-Rong Lee, Yu-Hung Hsieh, Ching-Ming Hsu,Atomic Layer Deposition of Nitrogen-Doped Titanium Dioxide Films Using Titanium Chloride and Ammonia Water as the Precursors,Journal of the Australian Ceramic Societyvol.45,no.2,pp64-68,2009 |
| 2009 | Ching-Ming Hsu, Chieh-Yang Huang, Hsyi-En Cheng, Wen-Tuan Wu,Flexible organic light-emitting diodes consisting of a platinum doped indium tin oxide anode,JOURNAL OF PHYSICS D-APPLIED PHYSICSvol.42,no.10,pp105301,2009 |
| 2008 | Tien-Chai Lin, Hsyi-En Cheng, Shih-Hung Tang, Wu-Chien Liu, Antony H.C. Lee,The characteristics and residual stress of aluminum nitride films grown by two-stage sputtering of mid-frequency power,Materials Science and Engineering Avol.480,no.1-2,pp226-231,2008 |
| 2008 | Tien-Chai Lin, Hsyi-En Cheng, Shih-Hung Tang, Wu-Chien Liu, Antony H.C. Lee,The characteristics and residual stress of aluminum nitride films grown by two-stage sputtering of mid-frequency power ,Materials Science and Engineering A ,vol.480 ,no.n1-2 ,pp.226–231 ,2008 |
| 2008 | M.-J. Chiang, C.-W. Wu, H.-E. Cheng,Effect of oxygen flow rate and temperature on the structure of DC sputtered nanocyrtsalline copper oxide films,Advanced Materials Researchvol.31,no.,pp129-131,2008 |
| 2008 | Hsyi-En Chenga and Chia-Chuan Chen,Morphological and photoelectrochemical properties of ALD TiO2 films ,Journal of The Electrochemical Society ,vol.155 ,no.9 ,pp.D604-D607 ,2008 |
| 2008 | Hsyi-En Cheng, Wen-Jen Lee, Ching-Ming Hsu, Ming-Hsiung Hon, Chien-Lung Huang,Visible light activity of nitrogen-doped TiO2 thin films grown by atomic layer deposition,Electrochemical and Solid-State Lettersvol.11,no.10,ppD81-D84,2008 |
| 2008 | Hsyi-En Cheng, Wen-Jen Lee, Ching-Ming Hsu, Ming-Hsiung Hon, Chien-Lung Huang,Visible light activity of nitrogen-doped TiO2 thin films grown by atomic layer deposition ,Electrochemical and Solid-State Letters ,vol.11 ,no.10 ,pp.D81-D84 ,2008 |
| 2008 | Hsyi-En Cheng, Chia-Chuan Chen,Morphological and photoelectrochemical properties of ALD TiO2 films,Journal of The Electrochemical Societyvol.155,no.9,ppD604-D607,2008 |
| 2006 | Hsyi-En Cheng, Chien-Tang Mao,In-situ substrate heating and postdeposition annealing on the compositions and electrical properties of tantalum oxide thin films grown by reactive sputtering ,Japanese Journal of Applied Physics ,vol.45 ,no.1A ,pp.160-164 ,2006 |
| 2006 | Hsyi-En Cheng, and Wen-Jen Lee,Properties of TiN films grown by atomic-layer chemical vapor deposition with a modified gaseous-pulse sequence ,Materials Chemistry & Physics ,vol.97 ,pp.315-320 ,2006 |
| 2006 | Hsu CM, Liu CF, Cheng HE, Wu WT,Low-temperature nickel-doped indium tin oxide anode for flexible organic light-emitting devices ,Journal of Electronic Materials ,vol.35 ,pp.383-387 ,2006 |
| 2005 | Hsyi-En Cheng, Wen-Jen Lee, C.-M. Hsu,The effect of deposition temperature on the properties of TiN diffusion barriers prepared by atomic layer chemical vapor deposition ,Thin Solid Films ,vol.485 ,no.1-2 ,pp.59-65 ,2005 |
| 2005 | Chien-Hsin Yang, Yi-Kai Chih, Hsyi-En Cheng, and Cheng-Ho Chen,Nanofibers of self-doped polyaniline ,Polymer ,vol.46 ,no.24 ,pp.10688-10698 ,2005 |
| 2004 | Hsyi-En Cheng, Yao-Wei Wen,Correlation between process parameters, microstructure and hardness of TiN films by chemical vapor deposition ,Surface & Coatings Technology ,vol.179 ,no.1 ,pp.103-109 ,2004 |
| 2003 | Hsyi-En Cheng, Tien-Chai Lin, and Wen-Chien Chen,Preparation of [0 0 2] oriented AlN thin films by mid frequency reactive sputtering technique ,Thin Solid Films ,vol.425 ,no.1-2 ,pp.85-89 ,2003 |
| 2003 | Hsyi-En Cheng, Chien-Tang Mao,The effect of substrate temperature on the physical properties of tantalum oxide thin films grown by reactive radio-frequency sputtering ,Materials Research Bulletin ,vol.38 ,no.14 ,pp.1841-1849 ,2003 |
| 1996 | Hsyi-En Cheng, Tain-Tsair Lin, Min-Hsiung Hon,Multiple twins induced [110] preferred growth in TiN and SiC films prepared by CVD ,Scripta Materialia ,vol.35 no.1 ,pp.113-116 ,1996 |
| 1996 | Hsyi-En Cheng, Min-Hsiung Hon,Texture formation in titanium nitride films prepared by chemical vapor deposition ,Journal of Applied Physics ,vol.79 ,no.10 ,pp.8047-8053 ,1996 |
| 1996 | Hsyi-En Cheng, Min-Hsiung Hon,Influence of TiN coating thickness on the wear of Si3N4-based cutting tools ,Surface & Coatings Technology ,vol.81 ,no.2-3 ,pp.256-261 ,1996 |
| 1995 | Hsyi-En Cheng, Min-Hsiung Hon,Growth Characteristics and Properties of TiN Coating by Chemical Vapor Deposition ,Journal of the Electrochemical Society ,vol.142 ,no.5 ,pp.1573-1578 ,1995 |
| 1994 | Hsyi-En Cheng, Min-Hsiung Hon,Growth mechanism of star-shaped TiN crystals ,Journal of Crystal Growth ,vol.142 ,no.1-2 ,pp.117-123 ,1994 |
| 研 討 會 論 文 |
| 2010 | 鄭錫恩、林淑、鎳奈米柱金屬電極之製備,第五屆全國氫能與燃料電池學術研討會 |
| 2010 | Kuan-Chun Huang, Hsyi-En Cheng,The characteristics of SnO2 films grown by atomic layer deposition,International Conference on Optics and Photonics in Taiwan> |
| 2010 | Hsyi-En Cheng , Yu-Chi Yang,Fabrication of flexible TiO2nanopillar photoelectrode,The 9th International Symposium on Advanced Technology (ISAT 9) |
| 2009 | Hsyi-En Cheng and Yu-Ru Chen,Effect of NH3-to-H2O injection ratio on the properties of atomic layer deposited N-doped TiO2 films,TACT 2009 International Thin Films Conference |
| 2009 | B.J. Yeh, H. E. Cheng, Y.H. Hsieh,Fabrication of nanoporous copper films by selective dealloying of Cu-Fe alloy,2009 International symposium on nanoscience and technology |
| 2009 | Chun-Te Lee, Hsyi-En Cheng,Enhancement of photocurrent response of N-doped TiO2 films by using a porous underlayer,8th International Symposium on Advanced Technology |
| 2008 | 陳羿志，陳家全，鄭錫恩，謝煜弘，基材種類對原子層沉積 TiO2膜性質之影響,2008台灣鍍膜科技年會 |
| 2008 | 章詠湟，陳智，鄭錫恩，陳家全,運用原子層沉積系統成長二氧化鈦奈米管之光檢測器應用,2008年材料年會 |
| 2008 | Y.-R. Chen, H. E. Cheng, Y.-H. Hsieh,Effect of argon purge amonut on the photoelectrochemical properties of nitrogen-doped tio2 films grown by atomic layer deposition,2008 International symposium on nanoscience and technology |
| 2003 | 譚立威,湯士弘,鄭錫恩, "電漿輔助蒸著有機發光元件保護膜之抗水氣滲透特性研究", 2003年鍍膜年會, 論文編號：G11. |
| 2003 | 湯士弘,鄭錫恩,林天財, "氮化鋁薄膜體聲波振盪器之模擬研究", 2003年鍍膜年會, 論文編號：D08. |
| 2003 | Hsyi-En Cheng, Chien-Tang Mao, "The structure and breakdown voltage of tantalum oxide thin films grown by reactive sputtering", International symposium on nano science and technology, Tainan, Taiwan, 4-7 November 2003, p197. |
| 2003 | Hsyi-En Cheng, Wen-Jen Lee, "The characteristics of TiN films grown by atomic layer chemical vapor deposition", International symposium on nano science and technology, Tainan, Taiwan, 4-7 November 2003, p56. |
| 2003 | 鄭錫恩、李文仁、毛健棠, "即時退火與沉積後退火對反應濺鍍氧化鉭薄膜結構與電性之影響", 2003年材料年會, .半導體材料. |
| 2003 | 鄭錫恩、李文仁, "以原子層化學氣相沉積法製備氮化鈦薄膜特性研究", 2003年電子元件暨材料研討會, pp.13-16. |
| 2002 | 林天財, 鄭錫恩, 陳文建,劉伍健, "以中頻濺射成長高優選取向AlN薄膜技術之研發", 2002年鍍膜年會, pp.399-402. |
| 2002 | 毛健棠, 鄭錫恩, 陳文建, 劉伍健, 林天財, "AlN成長於LiNbO3基板之表面聲波元件特性研究", 2002年材料年會, G.半導體材料. |
| 產 學 合 作 |
| 2019 | 原子層沉積氮化硼薄膜阻障特性分析 |
| 2017 | 氮化鋁原子層沉積特性分析 |
| 2011 | 顛覆傳統PU泡棉之環保透氣床墊與椅墊開發評估 |
| 2011 | 100年度補助技專校院建立特色典範計畫－綠能智慧電動車研發暨人才培育計畫－子計畫3 綠能與照明技術 |
| 2011 | 100學年度「產學攜手合作計畫」 |
| 2007 | 斜向濺鍍具特徵形貌氧化銦錫(ITO)之微結構與成長特性研究 |
| 國科會(科技部)計畫 |
| 2021 | 具高乙醇選擇性之室溫半導體型氣體感測器研發 |
| 2020 | 利用光子奈米結構操控光-物質交互作用及增益全無機金屬鹵化物鈣鈦礦發光元件及雷射 |
| 2019 | 以多重異質接合能帶調配技術及奈米粒子表面電漿技術提升薄膜光觸媒之光學吸收及光催化活性 |
| 2017 | 太陽能電解水低過電位陽極技術 |
| 2017 | 原子層沉積之氮化鈦新穎電漿子材料與光電元件及新穎光電材料之開發 |
| 2016 | 室溫半導體薄膜氣體感測器之研發 |
| 2016 | 以原子層沉積法製作氮化鈦之新穎電漿子材料與超穎材料及其光學性質與應用之研究 |
| 2015 | 原子層沉積二氧化鈦表面鈍化層對矽晶載子壽命之影響及其機制探討 |
| 2015 | 新穎電漿子材料製作之光子結構及光電元件之研究 |
| 2014 | 核殼奈米柱陣列結構鹼性電解水電極之開發 |
| 2012 | 核殼奈米柱三度空間電極染料敏化太陽能電池開發 |
| 2011 | 二氧化錫奈米柱氣體感測器之研發 |
| 2010 | 二氧化錫/二氧化鈦核殼奈米管柱之製備及其應用於染料敏化太陽能電池之研究 |
| 2009 | 原子層沉積高比表面積、高效能TiO2-xNx太陽能製氫電極之開發(3/3) |
| 2008 | 原子層沉積高比表面積、高效能TiO2-xNx太陽能製氫電極之開發(2/3) |
| 2007 | 原子層沉積高比表面積、高效能TiO2-xNx太陽能製氫電極之開發 |
| 2007 | 斜向濺鍍具特徵形貌氧化銦錫(ITO)之微結構與成長特性研究 |
| 2006 | 原子層沉積氮摻雜二氧化鈦薄膜之微結構、能隙及光電流特性研究 |
| 2005 | 原子層沉積二氧化鈦半導體光觸媒及其在可見光效率提升之研究 |
| 2004 | 原子層化學氣相沉積次90奈米銅導線金屬擴散阻障層之研究 |
| 2003 | 原子層化學氣相沉積氮化鈦薄膜之成長特性與性質研究 |
| 2002 | 有機電激發光裝置之封裝開發 |
| 2002 | 電漿輔助蒸著有機發光元件多層保護膜之抗水/氧滲透特性研究 |
| 指 導 碩 士 班 論 文 |
| 2010 | 原子層沉積二氧化錫薄膜特性研究 黃冠竣 |
| 2009 | Ni-TiO2核殼奈米柱陣列之製備及其光電化學特性研究 葉柏均 |
| 2009 | 模板輔助原子層沉積奈米結構二氧化鈦之光觸媒特性研究 陳羿志 |
| 2009 | 以多孔性底材提升二氧化鈦光電響應之研究 李俊德 |
| 2008 | 原子層沉積氮摻雜二氧化鈦薄膜之光電化學特性研究 陳宥儒 |
| 2006 | 原子層沉積氮摻雜二氧化鈦薄膜之特性研究 李孟融 |
| 2005 | 原子層沉積二氧化鈦薄膜光觸媒之特性研究 黃群勝 |
| 2005 | 反應濺鍍純二氧化鈦與氮摻雜二氧化鈦之薄膜特性研究 杜怡昶 |
| 2004 | 以原子層化學氣相沉積法成長氮化鈦薄膜之特性研究 李文仁 |
| 2004 | 兩階段磁控濺鍍法成長氮化鋁壓電薄膜之研究 湯士弘 |
| 2004 | 反應性濺鍍氧化鉭與氧化鉿薄膜特性之研究 譚立威 |
| 2003 | 即時退火與沉積後退火對反應濺鍍氧化鉭薄膜物理性質之影響研究 毛健棠 |
| 2003 | 反應性射頻磁控濺鍍法成長矽化物有機發光元件透明保護膜之研究 文耀葦 |
| 2002 | 以中頻反應性磁控濺射法成長[002]優選取向氮化鋁薄膜之研究 陳文建 |
| 大 學 部 專 題 |
| 2008 | 以不同金屬基版與應用與染料敏化太陽能電池 黃冠竣,林耿民 |
| 2008 | 反應性磁控濺鍍摻雜鎵(Ga)之氧化鋅(ZnO)薄膜光電特性研究 張嘉容,楊育綺 |
| 2008 | 以陽極氧化呂模板製備鎳奈米柱研究 林佑聰,陳逸凡 |
| 2006 | 濺鍍製成參數對三氧化鎢薄膜成長及光響應特性之影響 許展榮/林坦蔚 |
| 2006 | 兩階段成長微米級厚度多晶矽薄膜之研究 李欣達 |
| 2006 | 原子層沉積二氧化鈦薄膜之顯微結構分析 李慶峰/周盈慧 |
| 2002 | OLED防護層透水性實驗 林金標/李慶禧 |
